Silylating reagent, not a coupling agent or crosslinker. Reacts with hydroxyl and other active-hydrogen groups to install trimethylsilyl protecting groups, releasing ammonia. Used to render fumed silica and other mineral fillers hydrophobic, and as a surface-priming agent in semiconductor photolithography.
Product Code
N612
Hexamethyldisilazane (HMDS)
CAS Number
999-97-3
Description
Synonyms
Key applications
- Hydrophobic surface treatment of fumed silica and mineral fillers
- Photoresist adhesion priming in semiconductor lithography
- Trimethylsilyl protecting-group chemistry
Characteristics
| Family | Silane Intermediates & Reagents |
|---|---|
| Functionality | Silylating agent |
| Molecular formula | C6H19NSi2 |
| Molecular weight | 161.39 g/mol |